发明名称 SEMICONDUCTOR RADIATION DETECTOR AND ITS MEASURING APPARATUS
摘要 PURPOSE: To cut off an external noise with good efficiency by a method wherein a conductive metal sheet or a vapor-deposited sheet is formed on a mounting board for a detection element so as to be electrically insulated from the element. CONSTITUTION: A semiconductor radiation detection element 1 is mounted on a mounting board 2, and the board 2 is fixed to a detector case 3 by means of jigs 4. A radiation detection signal from the element 1 is taken out as a detection signal 6 via an electrode 5 for the element 1 in an insulated state from the case 3. Grounded conductive metal sheets (vapor-deposited films) 8 are formed on the excess surface and the rear surface of the board 2 on which the element 1 is mounted, and the element is attached to the case 3 via the jigs 4. Thereby, parts other than an incident window 7 are surrounded by the case 3, and external radio waves can be cut off completely. Since the grounded metal sheets 8 are formed on the same plane as the element 1, the external radio waves are drawn close to the metal sheets 8, and their incidence on the element 1 is relaxed.
申请公布号 JPH08201525(A) 申请公布日期 1996.08.09
申请号 JP19950008696 申请日期 1995.01.24
申请人 HITACHI LTD 发明人 KITAGUCHI HIROSHI;MIYAI YASUSHI;YAMAUMI SHIGERU;KAIHARA AKIHISA
分类号 G01B15/00;G01T1/24;H01L31/09;(IPC1-7):G01T1/24 主分类号 G01B15/00
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