| 摘要 |
A microfabricated, remotely actuated fluid pump includes a LIGA-fabricated movable member disposed within a cavity. The LIGA-fabricated movable member and the cavity cooperate to (a) define a sufficiently small clearance therebetween to achieve effective pumping action while (b) presenting a sufficiently low-friction fit to enable remote actuation. Such a pump can take the form of a piston pump, a vane pump, a centrifugal pump, a gear pump, etc. Other fluidic devices including flow sensors, piston valves, hydraulic motors, nozzles, and connectors can be fabricated using similar principles. |
