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发明名称
摘要
申请公布号
JP2522439(B2)
申请公布日期
1996.08.07
申请号
JP19900133009
申请日期
1990.05.23
申请人
MITSUBISHI ELECTRIC CORP
发明人
EGUCHI KOJI
分类号
H01L29/73;H01L21/331;H01L21/8228;H01L27/082;H01L29/732;(IPC1-7):H01L21/822
主分类号
H01L29/73
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代理人
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