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发明名称
CLEANING OF FILM FORMING DEVICE
摘要
申请公布号
JPH08199361(A)
申请公布日期
1996.08.06
申请号
JP19950011158
申请日期
1995.01.27
申请人
KAWASAKI STEEL CORP
发明人
KOBAYASHI SHUNICHI
分类号
C30B33/12;B81C99/00;C23C16/44;C23F1/12;H01L21/205;H01L21/302;H01L21/3065;H01L21/31;(IPC1-7):C23C16/44;H01L21/306
主分类号
C30B33/12
代理机构
代理人
主权项
地址
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