| 摘要 |
<p>PURPOSE: To produce a porous ceramic film suitable for use as a filter or a catalyst carrier, having high porosity, excellent in pressure resistance and having a controlled pore diameter. CONSTITUTION: This porous ceramic film 1 is a film joined to an oxide layer 4 disposed on the surface of a substrate 3, consisting of intertwisted deposits 2 such as fibers or whiskers and having 0.001-1μm average pore diameter of pores formed by the deposits 2. This porous ceramic film 1 is produced by forming the oxide layer 4 on the surface of the substrate 3 and heating them usually to 1,000-1,800 deg.C in an atmosphere of gas contg. at least one among Si, B and Al or at least one of groups IVa, Va and VIa metals and at least one of N and C usually under >=10Torr pressure.</p> |
