Vacuum chamber with vertical handling system and non-return valve

摘要

The component e.g. a silicon wafer (W), is supported at the end of a rod (8) within a vacuum chamber (1) and can be moved vertically. Located on the underside of the housing is a support system for the rod and also a vertical transfer actuator (30). The support has a tube (2) with a flange (5) and end cap (4) that maintains the sealed vacuum condition. Mounted on the rod is a magnetic element (12) and a pair of permanent magnets (16,17). Surrounding the tube is an electromagnet (11) and permanent magnets (14,15). The field generated provides a radial bearing support for the rod. Also coupled to the rod is a non return valve for the vacuum chamber.