发明名称 High-Q spiral inductor structure and methods of manufacturing the structure
摘要 A high-Q spiral inductor structure that utilizes a three-layer substrate, and methods of manufacturing the structure, are provided. The three-layer substrate is utilizable for CMOS circuits while at the same time minimizing eddy current induction and increasing the inductor quality factor Q of the structure.
申请公布号 US6342424(B1) 申请公布日期 2002.01.29
申请号 US20010828546 申请日期 2001.04.06
申请人 NATIONAL SEMICONDUCTOR CORP. 发明人 PICHLER CHRISTOPH
分类号 H01F17/00;H01F41/04;H01L21/02;H01L27/08;(IPC1-7):H01L21/20 主分类号 H01F17/00
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