| 摘要 |
The piezo-electric sensor senses three dimensionally the rotary angle in any direction while eliminating noises except the rotary angle. The sensor comprises: drive piezo-electric elements(1,11,2,12,3,13), vertically attached to surface centers of a metallic cube(7) of a regular hexahedron, performing a linear movement according to vibration in a thickness direction if an electric power is transmitted; sensing piezo-electric elements(4,14,5,15,6,16), attached to the drive piezo-electric elements(1,11,2,12,3,13) via insulation adhesives, generating electric charges correspondent to Coriallis force by the linear movement of the drive piezo-electric elements(1,11,2,12,3,13) and external rotary speed; differential amplifiers(41,42,43) amplifying the difference of the electric charges between each element pairs(4-14,5-15,6-16).
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