| 摘要 |
The piezo-electric sensor senses three dimensionally the rotary angle with repect to a 1st axis and a 2nd axis while getting strong to noises except the rotary angle. The sensor comprises: a drive piezo-electric element(11), attached to a bottom of a metallic cube(14), vibrating in the Z direction by an external AC signal; two pairs of rectagular shear type piezo-electric elements(2,12,3,13), attached to four surfaces protruded from a cross shaped support(16) installed on the top of the metallic cube(14), having the same polling direction(X direction, Y direction).
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