| 摘要 |
PURPOSE: To remove a protrusion on the surface of a polished member and to clearly determine its location by detecting the location of a protruded part from the presence or absence of the touch of any contact to the protruded part on the polished member and by facing polishing means toward the detected location to polish the surface of the polished member. CONSTITUTION: A control part 50 memorizes the location of a detected protruded part to record in an IC card 62 loaded in an input output part 60 together with the identification code of a color filter read by means of a code ready. In automatic polishing equipment 10, when the protruded part on the color filter detected by means of a surface detecting unit 230 passes under a polishing unit 104 with a polishing table moved from a loading part 14 side to a discharge part 18 side, a polishing head is moved to the location facing the protruded part to carry out polishing by means of a polishing tape. |
