| 摘要 |
PURPOSE: To detect a polishing protrusion and to assure the finishing of a polishing-completed polished member by providing a detecting means for detecting the location of the protrusion on the polished member by a grasping polishing means. CONSTITUTION: In a polishing work part 16, prior to surface polishing for a color filter 20 by means of a polishing unit 104, the surface of the color filter 20 is inspected by means of a surface inspecting unit 230 arranged at the upstream side of the polishing unit 104 in the polishing table moving direction, detecting the location of a protruded part. The polishing unit 104 is operated based on the inspection result from the surface inspecting unit 230. In addition, the presence or absence of the protruded part on the surface of the color filter 20 is again inspected when a polishing table 68 passed under the polishing unit 104 passes under a surface inspecting unit 280. |
