PROCESS SIMULATION DEVICE

摘要

PURPOSE: To provide a process simulation device which can analyze the impurity concentration distribution of a microfabricated semiconductor element in short analysis time. CONSTITUTION: A simple process simulator 4 which can repetitively execute simulation while input (process) data 3 is corrected and a highly precise process simulator 101 for obtaining a highly precise result 5 based on a process decided by the simulator 4 and for obtaining element characteristic (prediction) data 106 by a device simulator 105 are combined. A controller 2 controls them by adjusting them to the need of a user and two/three-dimensional process simulation is executed. Process simulation is repetitively executed for many times while the input process is corrected, and the appropriate process can be decided.