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发明名称
APPARATUS FOR HEAT TREATING THIN-FILM USING SECOND ROOM
摘要
申请公布号
KR1019960009975(B1)
申请公布日期
1996.07.25
申请号
KR1019930006993
申请日期
1993.04.26
申请人
发明人
分类号
主分类号
代理机构
代理人
主权项
地址
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