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发明名称
METHOD FOR EXTENDING WAFER SUPPORTING SHEET
摘要
申请公布号
KR960009989(B1)
申请公布日期
1996.07.25
申请号
KR19930003845
申请日期
1993.03.13
申请人
CASIO COMPUTER K.K.
发明人
UEKI, TETSURO
分类号
H01L21/301;B28D5/00;H01L21/00;H01L21/302;H01L21/673;(IPC1-7):H01L21/78
主分类号
H01L21/301
代理机构
代理人
主权项
地址
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