COMPLEX SURFACE ANALYSIS DEVICE

摘要

The multi-function surface analysis device performs the uniform surface etching regardless of the surface condition of the specimen in analyzing the depth profile of the specimen by using the specimen position adjuster(20) and the specimen holder(30). The device includes a tapered hole(22) for adjusting the specimen(33) position to keep normal to the ion gun, a rotary disk(23) of a doughnut shape having a rectangular protrusion(23a), a specimen position adjuster(20) having the protrusion(21) of a hemispheric shape, a shaft(31) inserted into the hole(22), ane under plate(32) having the groove(32a) receiving the rectangular protrusion(23a) to be flush with the upper plate(23) when the protrusion(21) and the concave surface(32b) are fitted to each other, and the upper plate(23).