| 摘要 |
A chamber gas heating device is provided to prevent generation of particles by not contacting a heater with a gas directly and maximize a contact surface between gas passage and a spiral groove. A heating part(10) has a body(11) made of a cylindrical heat conductor having an axial hole formed in a canter and a spiral groove formed around an outer periphery thereof, a heater(16) inserted in the axial hole and a gas passage(13) embedded in the spiral groove. A heat isolating part(30) made of fiber material encloses the outer periphery of the heating part, and a housing(40) made of metal material encloses the heat isolating part. The spiral groove has a depth larger than a height of the gas passage.
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