| 摘要 |
PURPOSE: To provide a laminated air-fuel ratio sensor which can be miniaturized and whose performance is excellent by a thin-film laminated structure. CONSTITUTION: A first electrode 2, a first solid electrolyte 3 and a second electrode 4 are laminated sequentially on a porous substrate 1, the first solid electrolyte 3 covers the first electrode 2 including the circumference of the first electrode 2, and the second electrode 4 covers the first solid electrolyte 3 indluding the circumference of the first solid electrolyte 3. In addition, an insulating layer 12 which covers the second electrode 4 so as to leave a second- electrode part, whose area is the same as or higher than the area of the first electrode 2, in a position opposed to the second electrode 2 is formed on the second electrode 4, a second solid electrolyte 5 and a third electrode 6 are laminated sequentially on the insulating layer 12 and/or the second electrode 4, and the insulating layer 12, the second solid electrolyte 5 and the third electrode 6 are arranged respectively so that the peripheral part of the second electrode 4 is exposed. Thereby, a laminated air-fuel ratio sensor whose durability and reliability are excellent, whose performance is good and which can be miniaturized remarkably is obtained. |
