发明名称 GAS EXCHANGE SYSTEM
摘要 PROBLEM TO BE SOLVED: To obtain a gas replacing system for coupling a purge gas source to an isolated structure for protecting an enclosed article against contamination of removing the purge gas source quickly therefrom. SOLUTION: The atmospheric gas in a sealed enclosure is replaced. Purge gas is introduced through a gas replacing system being coupled with an enclosure 100 or removed therefrom quickly. A suction cap surrounding the end part of a gas connection path forms an interface with a filter membrane 328 thus sealing a closing member. Outlet and inlet of a purge system and an exhaust system are automatically coupled through a spring action valve 352 upon removal of an isolation vessel. When the closing member is placed on the purge system, weight of the package prevails the spring force to open the valve thus allowing substitution gas flow. When an empty enclosure is placed on the system, the weight is insufficient to open the valve and only the enclosure added with the weight of a product is purged.
申请公布号 JPH08181045(A) 申请公布日期 1996.07.12
申请号 JP19950261890 申请日期 1995.10.09
申请人 INTERNATL BUSINESS MACH CORP <IBM> 发明人 ROBAATO RUISU DEANJIERISU;GARI MAIKERU GIYARAGAA
分类号 B65B55/00;B65D8/18;B65D81/20;B65D85/57;B65D85/86;H01L21/02;H01L21/673;(IPC1-7):H01L21/02 主分类号 B65B55/00
代理机构 代理人
主权项
地址