| 摘要 |
A roll-to-roll sputter device is provided to reduce plasma damage and minimize deformation of a flexible substrate through a low temperature process by sputtering a target, using plasma, and forming a thin film on the flexible substrate. A roll-to-roll sputter device(200) comprises a roll-to-roll unit(210), a sputter gun unit(230), and a gas spraying unit(250). The roll-to-roll unit includes an unwinder(211), a drum(215) exposing a flexible substrate to the sputter gun unit, and a rewinder(222) holding the flexible substrate. The flexible substrate is released by the unwinder, passes through guide rollers(212,219,221), spreader rollers(213,220), tension measuring rollers(214,216,218), a drum, a tension separating roller(217), and optical measuring units(M), and is held by the rewinder. Materials from the sputter gun unit are stacked on the flexible substrate. At least one sputter gun unit includes a pair of sputter guns(235a,235b) which are opposed to each other. Targets(270) are sputtered by rotation and reciprocation of electrons in a magnetic field.
|
