Scanning electron microscope with condenser lens system

摘要

The SEM condenser lens system (5) provides irradiation of a specimen (7) by a primary electron beam (4), which reducing the latter dia. An electron beam deflector (2) provides a two-dimensional rastering of the primary electron beam over the specimen. There is an objective lens (6) and a specimen table (13) with a mechanism for the specimen inclination. The specimen table comprises an inclination meter (25), while the primary electron beam can pass through an axis-symmetrical electrode (10) located on the electron beam path within the magnet pole of the objective lens. A control (11) couples the electrode voltage to the specimen table inclination, corresp. to the inclination meter output signal.