发明名称 Treating photoresist waste
摘要 <p>A method for treating an aqueous waste stream containing a photoresist waste component. Under this process the pH of the waste stream is adjusted in a range from about 4.0 to about 6.0 and an additive is added to the waste stream in a concentration effective to separate a precipitant from the waste solution in the form of a non-sticky residue. The additive is selected from the group consisting of FeCl2, CuCl2, NH4Cl, AlCl3 and combinations thereof.</p>
申请公布号 EP0544469(B1) 申请公布日期 1996.07.10
申请号 EP19920310621 申请日期 1992.11.20
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 ERB, ALLEN JEFFERSON
分类号 B01D21/01;C02F1/52;C02F1/62;(IPC1-7):C02F1/52 主分类号 B01D21/01
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