| 摘要 |
PURPOSE: To provide a glass base plate having extremely high flatness by a method wherein a glass base plate being a substance to be processed is fixed to a base bed by means of photo curable resin and a grinding work is effected by using fixing grinding grains. CONSTITUTION: A base bed 3 to which a glass base plate 1 is adhered is coated with ultraviolet ray curing resin 2 and the glass base plate 1 is placed thereon. When the glass base plate 1 is stabilized, the ultraviolet ray curing resin 2 is cured by irradiating with ultraviolet rays approximately for five minutes and the glass base plate 1 is adhered. A machining table 4 on which the base bed 3 is securely placed is reciprocated in a direction X by a hydraulic cylinder, a straight grinding wheel 5 is moved in a direction crossing the reciprocation at right angles, and flattening is effected through traverse grinding. After one surface is ground, by boiling the glass base plate 1 and the base bed 3 approximately for 20-30 minutes, the glass base plate 1 and the base bed are peeled from each other. A deformation amount of the glass plate 1 after release from fixing is average 20μm.
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