| 摘要 |
PURPOSE:To simplify the apparatus dispensing with a mechanical scanning means, by performing a linearly vertical illumination on a sample with a vertical illumination system. CONSTITUTION:A vertical illumination system B consists of a laser light source 1, a condensing lens 2, a polarization prism 3, a field lens 4, a 1/4 wavelength plate 5, an objective lens 6, a cylindrical lens 14 and a reflecting mirror 15 having a slit at the center thereof. An oblique illumination optical system A which performs a linearly vertical illumination onto a substrate 7 consists of a laser light source 20 and a condenser lens 19 to light the substrate 7 obliquely. A detection system C consists of a light shielding plate 18 having a light shielding section 18a for shielding 0th-order diffraction light, an imaging lens 9 and a one-dimensional solid image sensor 10a and a detection system D makes scattered light reflected on a reflector 15 form an image with an imaging lens 16 to take it with a one-dimensional solid image sensor 17. |
