| 摘要 |
The present invention relates to a method of removing a metal chloride that is an impurity from chloride silane or methyl chloride silane, and more particularly, to a method of easily removing a metal chloride that is an impurity from chloride silane or methyl chloride silane with high efficiency by converting a metal chloride, especially an aluminum chloride, that is an impurity generated while chloride silane or methyl chloride silane is produced, to a eutectic mixture of the metal chloride and an organic ammonium salt compound, or a mixture (preferably, a eutectic mixture) of the metal chloride, an organic ammonium salt compound and alkali metal halide, and then, separating and removing the metal chloride from the resultant mixture in a sedimentation separation step or a slurry processing step during a preparing process of chlorosilane or methyl chlorosilane. |
