| 摘要 |
<p>PURPOSE: To provide a controlling method for semiconductor production line that can simplify the configuration of a production control device. CONSTITUTION: A product ship-in instruction, recipe transmission instruction and product ship-out instruction are given to a semiconductor production control device 1 through semiconductor production devices 2.1 and 2.2. The device 1 instructs a transfer robot 3 to ship in a semiconductor product 5 according to the instructions and sends the recipe to the devices 2.1 and 2.2 so as to instruct the robot 3 to ship out the product 5. Thanks to such a system, the device 1 necessitates no consideration of timing of product shipping-in, recipe sending and product shipping-out.</p> |
