发明名称 METHOD FOR THINNING SEMICONDUCTOR PLATES
摘要 FIELD: microelectronic engineering. SUBSTANCE: underside of semiconductor plate carrying fully or partially formed components of solid-state devices and integrated circuits is thinned by using easily removable polymeric film for protecting its face side so as to produce epitaxy-free high- and low-voltage digital and integrated devices, integrated circuits, completely insulated, and the like. EFFECT: facilitated procedure.
申请公布号 RU94027655(A) 申请公布日期 1996.06.27
申请号 RU19940027655 申请日期 1994.07.20
申请人 VALIEV K.A.;VELIKOV L.V.;VOLKOV V.V.;KAZAKOV V.I.;KAL'NOV V.A.;KRAVCHENKO L.N.;KRASNIKOV G.JA. 发明人
分类号 H01L21/306 主分类号 H01L21/306
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