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发明名称
Lampentempervorrichtung und Verfahren
摘要
申请公布号
DE69116205(T2)
申请公布日期
1996.06.27
申请号
DE19916016205T
申请日期
1991.04.23
申请人
SUMITOMO ELECTRIC INDUSTRIES, LTD., OSAKA, JP
发明人
SHIGA, NOBUO, C/O YOKOHAMA WORKS, SAKAE-KU, YOKOHAMA-SHI, KANAGAWA, JP
分类号
H01L21/26;H01L21/00;(IPC1-7):H01L21/00
主分类号
H01L21/26
代理机构
代理人
主权项
地址
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