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发明名称
Halbleiteranordnung
摘要
申请公布号
DE69210935(D1)
申请公布日期
1996.06.27
申请号
DE19926010935
申请日期
1992.09.25
申请人
PHILIPS ELECTRONICS N.V., EINDHOVEN, NL
发明人
TIJBURG, RUDOLF PAULUS, NL-5656 AA EINDHOVEN, NL;VAN DER WAARDE, KAREL MARTINUS, NL-5656 AA EINDHOVEN, NL
分类号
H01L21/28;C23C14/02;H01L21/3205;H01L21/768;H01L23/522;H01L29/45;H01L33/14;H01L33/30;H01L33/40;H01S5/00;H01S5/042;(IPC1-7):H01L21/320;H01L29/40;H01L33/00;H01S3/025;G11C5/00
主分类号
H01L21/28
代理机构
代理人
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