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经营范围
发明名称
IC HEATER
摘要
申请公布号
JPH08166423(A)
申请公布日期
1996.06.25
申请号
JP19940332241
申请日期
1994.12.13
申请人
HITACHI ELECTRON ENG CO LTD
发明人
MAKIHARA NAOKAZU;YOKOZAWA KAZUHIDE;TSUSHIMA TOMO
分类号
G01R31/26;H01L21/66;(IPC1-7):G01R31/26
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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