| 摘要 |
PURPOSE: To produce an alloy capable of efficiently removing impurity components, particularly hydrocarbon and nitrogen, from a gas used for semiconductor manufacture, special lamps, etc., by specifying the composition of a Zr-base alloy. CONSTITUTION: This alloy is an alloy for gas purification, having a composition represented by composition formula Ax Vy B2.0-y when A represents a combination of any of ZrHf, ZrMm, and ZrHfMm and B represents at least one element among Al, Fe, and W [where Mm means misch metal, V means vanadium, and (x) and (y) in the composition formula satisfy the conditions of 0.80<=x<=2.50 and 1.00<=y<=1.90, respectively]. It is preferable to add Ta and Mo further to the composition. At this time, the composition formula, when C(Ta, Mo) means at least either of Ta and Mo, is represented by Ax Vy (BC)2.0-y . At the time of gas purification, a powder of each alloy of <=100μm grain size is pelletized and the resulting pellets are brought into contact with the gas to be purified and allowed to absorb the impurities in the gas.
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