| 摘要 |
<p>PURPOSE: To enable cleaning without disassembling and separating an attraction surface of an attraction body from a process device. CONSTITUTION: In a sample holding device, dielectric 5 is laminated in an electrode board 6, electric potential difference is generated between the electrode board 6 and an attraction body and an attraction body is held at an attraction surface of the dielectirc 5. It has a dust removal mechanism which is composed of at least a clean attraction plate 1a which is formed of a semiconductive material and can be fixed and removed freely, a circuit 8a which is connected to the attraction plate 1a through a conductive part 7, has a d.c. power supply 8 and a switch 9 and generates electric field between the attraction plate 1a and the electrode plate 6 and a mechanism which removes the attraction plate 1a after dust of an attraction surface is attached to the attraction plate 1a by electric field. Thereby, contamination of a rear of an attraction plate can be prevented.</p> |
