| 摘要 |
PURPOSE: To provide a dielectric optical waveguide which can be easily produced and has high transmission efficiency. CONSTITUTION: A recessed groove 5 or projection ridge 6 having a mesa structure is formed in a semiconductor substrate 1. A first clad layer 2, optical waveguide layer 3, and second clad layer 4 are successively formed in one film forming process on the surface of the substrate 1 where the mesa structure is formed. When light is made incident on the end face of the part 3B of the optical waveguide layer corresponding to the bottom of the groove 5 or the part 3C of the optical waveguide layer corresponding to the top of the ridge 6, the light is confined and transmitted in the area 3B or 3C. |
