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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH08162537(A)
申请公布日期
1996.06.21
申请号
JP19940303346
申请日期
1994.12.07
申请人
HITACHI LTD;HITACHI TOBU SEMICONDUCTOR LTD
发明人
IGA KAZUYOSHI
分类号
H01L29/40;H01L21/66;H01L21/82;H01L21/822;H01L27/04;(IPC1-7):H01L21/82
主分类号
H01L29/40
代理机构
代理人
主权项
地址
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