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经营范围
发明名称
SIMULATION METHOD
摘要
申请公布号
JPH08160103(A)
申请公布日期
1996.06.21
申请号
JP19940297123
申请日期
1994.11.30
申请人
TOSHIBA CORP
发明人
SHIBUSAWA YOSHIHIRO;SUSA HIDEYA
分类号
G01R31/316;G01R31/28;G06F17/50;H01L21/66;(IPC1-7):G01R31/28
主分类号
G01R31/316
代理机构
代理人
主权项
地址
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