| 摘要 |
PURPOSE: To confirm the normal operation of a leveling adjuster in real time by installing a monitor to supervise the operation of the leveling adjuster. CONSTITUTION: A leveling adjuster 40 is equipped with a monitor 20 indicating real-time displacements of a leveling stage 42. Shapes, dimensions, and positions are arranged irregularly in waves in already known recesses and projections on the surface of a wafer for inspection, and a shape very close to the actual shape is formed on the surface of the wafer. For inspection of the leveling adjuster 40, the wafer for inspection is placed on the wafter mounting surface of the wafer table of the leveling adjuster 40. Next, a leveling inspection unit 50 is operated to inspect a leveling of any part of the wafter, then the leveling adjuster is operated to check its operating status by the monitor 20. In this way, whether the leveling adjuster 40 is normally operating is checked in real time. |
