发明名称 Vorrichtung zum Ziehen von Einkristallen
摘要 A single crystal pulling apparatus of the Czochralski method type wherein the cylindrical heater (5) is supported not only by the two exisiting electrodes (7) which are vertically shiftable but also by one or more vertical shafts (8), which may be electrodes or electrically insulated dummy electrodes; the vertical shafts are capable of shifting vertically in synchronism with the exisiting two electrodes, and are arranged in a manner such that the existing two electrodes and the vertical shafts are at regular intervals along the bottom circumference of the cylindrical heater. <IMAGE>
申请公布号 DE69210642(D1) 申请公布日期 1996.06.20
申请号 DE1992610642 申请日期 1992.02.13
申请人 SHIN-ETSU HANDOTAI CO., LTD., TOKIO/TOKYO, JP 发明人 ODA, MICHIAKI, ANNAKA-SHI, GUNMA-KEN, JP;MIZUISHI, KOJI, ANNAKA-SHI, GUNMA-KEN, JP
分类号 C30B11/00;C30B15/14;C30B29/06;H01L21/208;(IPC1-7):C30B15/14 主分类号 C30B11/00
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