| 摘要 |
<p>PURPOSE:To prevent a wafer from being contaminated by a method wherein a specific resin is used for a housing container of an IC wafer. CONSTITUTION:A high nitrile resin whose content of an unsaturated nitrile monomer is 50weight% or higher is molded. The high nitrile resin is a copolymer which is composed mainly of the unsaturated nitrile monomer such as acrylonitrile, methacrylonitrile or the like; styrene, butadiene, isoprene or the like can be enumerated as a monomer which can be copolymerized with the unsaturated nitrile monomer; one or more kinds of them are copolymerized with the unsaturated nitrile monomer. Thereby, a chemical-resistant property can be enhanced; it is possible to prevent a swelling by a solvent from being caused and an IC wafer from being contaminated.</p> |
