Sensor unit with at least one micro-mechanical rotation rate sensor esp. for regulating vehicle undercarriage and brake systems

摘要

The sensor unit has at least one sensor element (DS) manufactured by micro-mechanical technology. This has an input axis (Z). The sensor element (DS) has a corresponding substrate (TS) which serves to hold the sensor element. Electronic components for analysing and or driving the sensor element can be arranged on the substrate (TS), The sensor element (DS) has a free-standing girder structure with a seismic mass (SM) held with two leaf springs (B) such that it can swing. Two double comb structures (DK) are attached to the structure. The structure is fixed at two ends to the substrate (TS) by fasteners (EO) and is electrically connected to the substrate by fasteners (EO) and is electrically connected to the substrate by conductive tracks on the fasteners (EO). The sensor element has four conductive tracks on the fasteners (EO). The sensor element has four comb electrodes (FS1, FS2, FS3, FS4) fixedly connected to the substrate, with corresponding electric leads (E1, E2, E3, E4). These form interdigital capacitors with the double comb structure of the swinging element. The structure (B, DK, SM) can be stimulated to swing laterally in the plane of the sensor element. Rotation of the sensor element (DS) about the axis (Z) perpendicular to the plane of the sensor element is detected and signals corresponding to the rotation are provided.