发明名称 Apparatus for coating of optical substrate
摘要 Optical substrates, partic. glasses or lenses (3), are coated with coating having reversible photochromic characteristics in a gas-tight evacuable vessel contg. an atmos. of inert gas, in which a support (2) for the substrates (3) to be coated is carried on a shaft for rotation is spaced from a sputter source or pref. two sputter sources (4). Sputter source is held by a mounting (5) which executes a wobbling motion or quasi-wobbling motion, motions opposing each other where two sources are provided. The substrate support is pref. eccentrically mounted on its shaft.
申请公布号 EP0716161(A1) 申请公布日期 1996.06.12
申请号 EP19950117899 申请日期 1995.11.14
申请人 SATIS VACUUM INDUSTRIES AG 发明人 SUTER, RUDOLF
分类号 C23C14/34;H01J37/34 主分类号 C23C14/34
代理机构 代理人
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