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发明名称
Vacuum processing system
摘要
申请公布号
EP0488620(B1)
申请公布日期
1996.06.12
申请号
EP19910310822
申请日期
1991.11.25
申请人
HITACHI, LTD.
发明人
KATO, SHIGEKAZU;TAMURA, NAOYUKI;NISHIHATA, KOUJI;TSUBONE, TSUNEHIKO;ITOU, ATSUSHI
分类号
B01J3/02;B65G49/07;H01L21/677;(IPC1-7):H01L21/00
主分类号
B01J3/02
代理机构
代理人
主权项
地址
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