Leak detector

摘要

The detector unit (1) using a mass spectrometer is connected to the input of a secondary vacuum pump (2) which is also connected through a valve (15) to the flange of test vessel. A preliminary vacuum pumping group (5) is also connected to the test vessel (13) through a valve (12). The pumping group (5) which comprises a further secondary pump (6) and a primary mechanical pump (7) is also connected to the output and an intermediate point on the first secondary pump (2) through valves (4, 10). Leaks of varying severity may be found by using the valves to connect the pumps in various ways and the spectrometer (1) to detect contraflow.