Probe element for coordinate measurement systems

摘要

PCT No. PCT/EP93/03647 Sec. 371 Date Aug. 18, 1994 Sec. 102(e) Date Aug. 18, 1994 PCT Filed Dec. 21, 1993 PCT Pub. No. WO94/15171 PCT Pub. Date Jul. 7, 1994.In a probe element for coordinate measuring systems using micro-probe elements and piezo-resonators which change their resonance characteristics upon contact, the probe element has piezo-resonators arranged in a polygonal configuration. Micro-probe elements are arranged in a polygonal configuration on the piezo-resonators and sense inner and outer surfaces in different coordinates. The tactile sensing of the micro-probe elements on the surface of the specimen is effected by measuring the change in the resonance characteristics of the piezo-resonators.