Optical waveguide modulator having a reduced D.C. drift

摘要

An optical waveguide device usable as an optical wave-modulator and having a reduced DC drift includes a LiNbO3 substrate, an optical waveguide formed in a front surface portion of the substrate, a dielectric layer covering the front surface of the substrate and the optical waveguide surface, and an electrode system arranged on the dielectric layer, the dielectric layer comprising a matrix component consisting of an amorphous SiO2 and a doping element component consisting of Li and/or Nb; and having a refractive index lower than that of the amorphous SiO2 matrix free from the doping element component.