摘要 |
<p>PURPOSE: To enable manufacturing a nonlinear element excellent in in-surface reproducibility, by forming a nonlinear resistance layer by a sputtering method using a target of zinc sulfide in which transition metal sulfide formed by sulfating transition metal element is mixed. CONSTITUTION: After an orientation film 61 is spread on the surfaces of an element side substrate 57 and a facing side substrate 59 on which surfaces nonlinear elements, electrodes, etc., are formed, orientation treatment is performed, and then the substrates 57 and 59 are so stuck to each other that the orientation film 61 becomes inside. Then a White-Taylor type guest-host liquid crystal 62 is injected in the part between the substrates 57 and 59, and the injection port is sealed. Thereby the formation of a liquid crystal display device is finished. In this manufacturing method, in-surface reproducibility is improved by using a ZnS target in which nickel sulfide is mixed. Thereby irregularity of elements between manufacturing lots is eliminated, so that a display device using the nonlinear element like this can be stably supplied.</p> |