| 摘要 |
PURPOSE: To provide an illuminator which has high illumination intensity and an exposure apparatus having the illuminator and high throughput. CONSTITUTION: The illuminator comprises a light source for forming at least a predetermined size of light source image or a light source unit to supply parallel luminous fluxes, a light source section having a totally reflecting optical integrator 2 formed by a plurality of totally reflecting mirrors to reflect the luminous fluxes from the light source unit to form a plurality of light source images, and an illuminating optical system 4 for converging the fluxes from the plurality of the images to illuminate it to an element 5 to be illuminated. |
