发明名称 CONNECTING METHOD FOR SPUTTERING TARGET MATERIAL
摘要 PURPOSE: To improve wettability and adhesiveness so as to endure use in a high vacuum condition by connecting by soldering a target member and a cooling member formed with a film of Ti, Pt, Au and Ge. CONSTITUTION: A film of Ti, Pt, Au and Ge having a 0.05 to 1.00μm thickness is successively applied to a connection-difficult target member 1 and cooling member 2. Next in connection surfaces of this target member 1 and cooling member 2, a solder foil 3 is arranged and heated to connect the members to each other.
申请公布号 JPH08148086(A) 申请公布日期 1996.06.07
申请号 JP19940283141 申请日期 1994.11.17
申请人 HITACHI LTD 发明人 HAMA HIROSHI;ARAKI ICHIRO;KAJIWARA HIDEFUMI
分类号 H01J9/14;(IPC1-7):H01J9/14 主分类号 H01J9/14
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