| 摘要 |
<p>PURPOSE: To provide a wafer carrying container which can effectively prevent breakdown and charge of a semiconductor wafer during carrying by a car, an airplane, etc. CONSTITUTION: The title container is provided with a container body 26 for containing a semiconductor wafer 21, a container lid 27 which can freely open and close a containing opening 26a of the container body 26 and fixing means 22, 30, 31, 37 for fixing the semiconductor wafer 21 inside a container 25 with the container lid 27 closed. An injection port 27c which is plugged with an injection tap 34 during carrying is provided in a top part of the container lid 27. The container 25 is charged with liquid 38 during carrying.</p> |
