METHOD FOR MAKING ELECTRICAL DEVICES FROM ION-IMPLANTED CONDUCTIVE POLYMERS

摘要

Organic films are applied from solvent solution to a substrate, then are ion- implanted to have resistivity in the kilohm/square to gigaohm/square range. The films are then patterned by standard lithographic procedures, with surprisingly little loss of conductivity, in spite of contact with organic solvents or acidic or basic etchant solutions during the patterning process. Both structures which contact the substrate, and freestanding conductive polymer bridges, can be formed. The invention provides a method of producing electrical devices which does not require the use of single crystal semiconductor substrates or deposition of inorganic semiconductors. The resulting devices are highly resistant to damage from abrasion, solvents, acids, bases, and moisture.