发明名称 |
Self-assembled monolayer coating for micro-mechanical devices |
摘要 |
A method of forming of a monomolecular coating (19) for surfaces of contacting elements (11, 17) of micro-mechanical devices (10), specifically, devices that have moving elements that contact other elements and that tend to stick as a result of the contact. The method uses liquid deposition, with the device being placed in a solution that contains a precursor to the formation of the coating. The precursor is chosen based on coordination chemistry between the precursor and the surface to be coated.
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申请公布号 |
US5523878(A) |
申请公布日期 |
1996.06.04 |
申请号 |
US19940268485 |
申请日期 |
1994.06.30 |
申请人 |
TEXAS INSTRUMENTS INCORPORATED |
发明人 |
WALLACE, ROBERT M.;WEBB, DOUGLAS A.;GNADE, BRUCE E. |
分类号 |
B81B3/00;B81C1/00;G02B6/122;G02B26/08;(IPC1-7):G02B26/00 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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