| 摘要 |
PURPOSE: To remove fine crack and dross generated in executing piercing to a base plate made of glass. CONSTITUTION: A resist film 7 is formed by applying resist material on a base plate 6 made of glass and a work W is produced. CO laser beam L generated by CO laser beam machine 1 is reflected by a mirror 2, guided to a machining lens 3 and collected by the machining lens 3, the part to be pierced of resist film 7 of work W is irradiated with laser beam, further, assist gas 5 is supplied from a machining nozzle 4 and then the hole 8 piercing through work W is formed. Further, by immersing the work W formed with the hole 8 in the fluoric acid solution of prescribed concentration and subjecting to etching, the fine crack and dross generated in pierced part are removed. |
